[Spm] Re: Spm Digest, Vol 62, Issue 2: Cleaning of TGT-01 grating

Bert Lägel laegel at physik.uni-kl.de
Wed Sep 2 08:54:06 EDT 2009


Hi Chris,

Blow off the dust with a nitrogen gun. Then I would first try the standard 
cleaning procedure, i.e. cleaning with acetone-IPA-DI water in an ultrasonic 
bath. The acetone probably dissolves the glue/epoxy that holds the Si 
grating on the metal disc - so you might want to get some epoxy to glue it 
back on.

If that is not enough try 1-5min in Pirana (H2SO4: H2O2, 1:3). You will have 
to remove the Si-chip from the metal holder for this! (Don't forget to rinse 
plenty in DI water after Pirana- I usually do that in an US bath, change 
water after 5min, 5x). Please check up on the Pirana procedure if you 
haven't done this before!

Best to use cleanroom equipment/environment for cleaning.

Good luck!

-------------------------------------------------
Dr. Bert Lägel
Wiss. Mitarbeiter
TU Kaiserslautern
Nano+Bio Center
Paul-Ehrlich-Str. Geb. 13,

phone:  x49-(0)631-2054336
e-mail:   laegel at physik.uni-kl.de
web:     http://www.nbc.uni-kl.de




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