[Spm] Re: Spm Digest, Vol 37, Issue 10
Shuchen Hsieh
shuchen.hsieh at gmail.com
Fri Aug 24 05:32:43 EDT 2007
Hi Don,
Our experience is wearing Latex glove and gently rubbing the substrate with
dish washing detergent (PH~7, if you have Extran neutral MA02 detergent is
even better) and water for 30s. Then, rinse thoroughly with water and finish
up with ethanol rinse before water dry out. Finally, blows dry the substrate
with nitrogen gas.
This process should end up a layer of detergent chemicals (~ nm) on your μm
size pits grating.
If you want to further remove this organic layer, you can use plasma,
piranha or UV-ozone.
Hope this helps,
Shuchen
------------------------------------------------------------------------
Shuchen Hsieh, Ph.D.
Assistant Professor,
Department of Chemistry, National Sun Yat-Sen University
70 Lien-Hai Rd, Kaohsiung, Taiwan 80424
TEL: 886-7-5252000 ext 3931
FAX: 886-7-5253908
shsieh at mail.nsysu.edu.tw
-----------------------------------------------------------------------
Date: Mon, 20 Aug 2007 12:11:59 -0400
> From: "Don Chernoff at ASM"
> Subject: [Spm] Cleaning waffle calibration gratings
> To: "SPM List"
> Message-ID: <003101c7e344$d9d143c0$6701a8c0 at asm15>
> Content-Type: text/plain; charset="iso-8859-1"
>
> Many AFMs are supplied with a 'waffle grating' to calibrate the XYZ
> axes. Typically, the pattern consists of 5 um wide pits on a square
> grid with 10 um pitch. The pits are normally 180 nm deep (older
> gratings) or 200 nm deep (newer gratings). Many of the older
> gratings seem to accumulate small bumps (< 0.5 um wide) that are
> 10-50 nm high.
> What cleaning techniques are useful for these gratings so that
> nano-dirt does not interfere with the measurements? For example,
> has anyone tried CO2 snow cleaning? Plasma cleaning?
>
> I myself have tried ultrasonic cleaning, using an ordinary small lab
> unit (not megasonic). This succeeded in breaking large clumps into
> smaller ones and spreading them across the surface, so that the
> specimen was less useful than before.
>
> regards,
> Don
> =============================================
> Don Chernoff, Ph.D., President
> Advanced Surface Microscopy, Inc. E-Mail: donc at asmicro.com
> 3250 N. Post Rd., Ste. 120 Voice: 317-895-5630
> INDIANAPOLIS IN 46226 USA Toll free: 800-374-8557 (in USA & Canada)
> web: http://www.asmicro.com Fax: 317-895-5652
> [business activities: analytical services in AFM, AFM probes,
> consulting, training,
> calibration and test specimens, calibration and measurement software,
> used NanoScope equipment.]
> =============================================
>
> -----------------------------------------------------------------------------------------------
>
>
> Today's Topics:
>
> 1. RE: Spm Digest, Vol 37, Issue 8 Cleaning waffle calibration
> gratings (Don Chernoff at ASM (Igor Sokolov)
> 2. Re: Cleaning waffle calibration gratings (trizwan at ualberta.ca)
> 3.
>
> =?GB2312?B?UmU6IFtTcG1dIENsZWFuaW5nIHdhZmZsZSBjYWxpYnJhdGlvbiBncmF0aW5ncw==?=
> (Yang Gan (¸ÊÑô))
>
>
> ----------------------------------------------------------------------
>
> Message: 1
> Date: Wed, 22 Aug 2007 12:22:35 -0400
> From: "Igor Sokolov" <isokolov at clarkson.edu>
> Subject: [Spm] RE: Spm Digest, Vol 37, Issue 8 Cleaning waffle
> calibration gratings (Don Chernoff at ASM
> To: <spm at spmlist.di.com>
> Message-ID: <017601c7e4d8$a5f4ef30$47129980 at sc.clarkson.edu>
> Content-Type: text/plain; charset="us-ascii"
>
> Dear Don,
> We tried for fun to clean with ultrasonic (also not megasonic) in piranha
> acid which partial success (in principle, the quality was not too bad).
> Plasma cleaning and even etching with SEM plasma sputter/ cleaner/etcher
> gave not a lot success (worth than the piranha treatment). What we have
> found the most positive so far is that the flat surface can be cleaned
> with
> ultrapure water and a brush type of polymeric pad used in postCMP
> (chemical-mechanical planarizarion) processes to remove abrasive
> nanoparticles.
> If you find any other good method, please tell me.
> Best regards,
> Igor
>
> _____________________________________
> Igor Sokolov, Ph.D.
> Associate Professor,
> Departments of Physics, Chemistry,
> Center for Advanced Materials Processing,
> Clarkson University,
> Potsdam, NY 13699-5820, USA
>
> office: 315-268-2375
> fax: 315-268-6610
> cell: 315-212-4865
> Skype: sokig2007
> E-mail: isokolov at clarkson.edu
> Web: http://www.clarkson.edu/~isokolov/
> ______________________________________
>
>
> ------------------------------
>
> Message: 2
> Date: Mon, 20 Aug 2007 12:11:59 -0400
> From: "Don Chernoff at ASM" <donc at asmicro.com>
> Subject: [Spm] Cleaning waffle calibration gratings
> To: "SPM List" <spm at spmlist.di.com>
> Message-ID: <003101c7e344$d9d143c0$6701a8c0 at asm15>
> Content-Type: text/plain; charset="iso-8859-1"
>
> Many AFMs are supplied with a 'waffle grating' to calibrate the XYZ axes.
> Typically, the pattern consists of 5 um wide pits on a square grid with 10
> um pitch. The pits are normally 180 nm deep (older gratings) or 200 nm
> deep
> (newer gratings). Many of the older gratings seem to accumulate small
> bumps (< 0.5 um wide) that are 10-50 nm high.
> What cleaning techniques are useful for these gratings so that nano-dirt
> does not interfere with the measurements? For example, has anyone tried
> CO2
> snow cleaning? Plasma cleaning?
>
> I myself have tried ultrasonic cleaning, using an ordinary small lab unit
> (not megasonic). This succeeded in breaking large clumps into smaller
> ones
> and spreading them across the surface, so that the specimen was less
> useful
> than before.
>
> regards,
> Don
> =============================================
> Don Chernoff, Ph.D., President
> Advanced Surface Microscopy, Inc. E-Mail: donc at asmicro.com
> 3250 N. Post Rd., Ste. 120 Voice: 317-895-5630
> INDIANAPOLIS IN 46226 USA Toll free: 800-374-8557 (in USA & Canada)
> web: http://www.asmicro.com Fax: 317-895-5652
> [business activities: analytical services in AFM, AFM probes, consulting,
> training,
> calibration and test specimens, calibration and measurement software,
> used NanoScope equipment.]
> =============================================
>
>
>
>
> ------------------------------
>
> Message: 2
> Date: Wed, 22 Aug 2007 11:58:50 -0600
> From: trizwan at ualberta.ca
> Subject: [Spm] Re: Cleaning waffle calibration gratings
> To: spm at spmlist.di.com
> Cc: donc at asmicro.com
> Message-ID: <20070822115850.a1iy5522ask84kko at webmail.ualberta.ca>
> Content-Type: text/plain; charset=ISO-8859-1; DelSp="Yes";
> format="flowed"
>
>
> Hi Don,
>
> We clean our grating using a replicating tape purchased from Ted Pella
> Inc. It works well in removing most of the troublesome contaminants.
> All you do is cut a piece of it and place it on the grid surface, put
> a tiny drop of acetone on to the tape to dissolve it, allow the
> acetone to evaporate out and pull off the tape once it hardens.
>
> Hope this works for you as well.
>
> Regards,
> Tania
>
>
> _________________________________
> Tania Rizwan
> Graduate Student
>
> Colloids and Complex Fluids (CCF) Lab
> Department of Mechanical Engineering
> 4-9 Mechanical Engineering Building
> University of Alberta
> Edmonton, AB T6G 2G8
>
> Tel:780-492-9673
> Lab:780-492-8722
> Fax:780-492-2200
> email: trizwan at ualberta.ca
>
> > Date: Mon, 20 Aug 2007 12:11:59 -0400
> > From: "Don Chernoff at ASM"
> > Subject: [Spm] Cleaning waffle calibration gratings
> > To: "SPM List"
> > Message-ID: <003101c7e344$d9d143c0$6701a8c0 at asm15>
> > Content-Type: text/plain; charset="iso-8859-1"
> >
> > Many AFMs are supplied with a 'waffle grating' to calibrate the XYZ
> > axes. Typically, the pattern consists of 5 um wide pits on a square
> > grid with 10 um pitch. The pits are normally 180 nm deep (older
> > gratings) or 200 nm deep (newer gratings). Many of the older
> > gratings seem to accumulate small bumps (< 0.5 um wide) that are
> > 10-50 nm high.
> > What cleaning techniques are useful for these gratings so that
> > nano-dirt does not interfere with the measurements? For example,
> > has anyone tried CO2 snow cleaning? Plasma cleaning?
> >
> > I myself have tried ultrasonic cleaning, using an ordinary small lab
> > unit (not megasonic). This succeeded in breaking large clumps into
> > smaller ones and spreading them across the surface, so that the
> > specimen was less useful than before.
> >
> > regards,
> > Don
> > =============================================
> > Don Chernoff, Ph.D., President
> > Advanced Surface Microscopy, Inc. E-Mail: donc at asmicro.com
> > 3250 N. Post Rd., Ste. 120 Voice: 317-895-5630
> > INDIANAPOLIS IN 46226 USA Toll free: 800-374-8557 (in USA &
> Canada)
> > web: http://www.asmicro.com Fax: 317-895-5652
> > [business activities: analytical services in AFM, AFM probes,
> > consulting, training,
> > calibration and test specimens, calibration and measurement software,
> > used NanoScope equipment.]
> > =============================================
>
>
>
>
> ------------------------------
>
> Message: 3
> Date: Wed, 22 Aug 2007 16:15:50 +0800
> From: "Yang Gan (¸ÊÑô)" <ygan at hit.edu.cn>
> Subject:
>
> =?GB2312?B?UmU6IFtTcG1dIENsZWFuaW5nIHdhZmZsZSBjYWxpYnJhdGlvbiBncmF0aW5ncw==?=
>
> To: spm at spmlist.di.com
> Cc: donc at asmicro.com
> Message-ID: <W01GTPkiEP5m$LEKcZ5LX$uP5nbn4h at ygan>
> Content-Type: text/plain
>
> Hi Don,
>
> On your question, I searched the archive and pasted my past message here.
> Hope it helps.
>
> Cheers
> Yang
>
> Prof. Yang Gan
> Department of Applied Chemistry
> Harbin Institute of Technology
> No.92, West Da-Zhi Street, Harbin
> Heilongjiang 150001
> P. R. China
>
> >>>>>
> Hi Valeria,
>
> Absolutely sonicating will damaging your gratings, the only tip I know is
> a "secret" recipe from T. G. Schneider, "Cleaning a calibration standard
> grid", appeared in Microscopy Today, April, pp. 35.
>
> He put a drop of silicone onto the grid then peel it off after curing,
> thus remove minor trace of dirties on the surface. I have never tried this
> tip, so you may find many details from the article above.
>
> As far as I know, this issue is still free to access from the official
> website, so enjoy DIY!
>
> Cheers
> Yang
> >>>>>>
>
> From: "Don Chernoff at ASM" <donc at asmicro.com>
> Subject: [Spm] Cleaning waffle calibration gratings
>
> Many AFMs are supplied with a 'waffle grating' to calibrate the XYZ
> axes. Typically, the pattern consists of 5 um wide pits on a square grid
> with 10 um pitch. The pits are normally 180 nm deep (older gratings) or 200
> nm deep (newer gratings). Many of the older gratings seem to accumulate
> small bumps (< 0.5 um wide) that are 10-50 nm high.
> What cleaning techniques are useful for these gratings so that nano-dirt
> does not interfere with the measurements? For example, has anyone tried CO2
> snow cleaning? Plasma cleaning?
>
> I myself have tried ultrasonic cleaning, using an ordinary small lab unit
> (not megasonic). This succeeded in breaking large clumps into smaller ones
> and spreading them across the surface, so that the specimen was less useful
> than before.
>
> regards,
> Don
> =============================================
> Don Chernoff, Ph.D., President
> Advanced Surface Microscopy, Inc. E-Mail: donc at asmicro.com
> 3250 N. Post Rd., Ste. 120 Voice: 317-895-5630
> INDIANAPOLIS IN 46226 USA Toll free: 800-374-8557 (in USA & Canada)
> web: http://www.asmicro.com Fax: 317-895-5652
> [business activities: analytical services in AFM, AFM probes, consulting,
> training,
> calibration and test specimens, calibration and measurement software,
> used NanoScope equipment.]
> =============================================
>
>
> Prof. Yang Gan
> Department of Applied Chemistry
> Harbin Institute of Technology
> No.92, West Da-Zhi Street, Harbin
> Heilongjiang 150001
> P. R. China
>
>
>
> ------------------------------
>
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> Spm mailing list
> Spm at spmlist.di.com
>
> http://www.veeco.com/library/community_type.php?type_id=2amp;sub_id=2amp;tech_sub_id=1
>
>
> End of Spm Digest, Vol 37, Issue 10
> ***********************************
>
--
-----------------------------------------
中山大學化學系
助理教授 謝淑貞
Shuchen Hsieh, PhD
(07)5252000 ext 3931
shsieh at mail.nsysu.edu.tw
------------------------------------
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